New Step by Step Map For Noohapou
New Step by Step Map For Noohapou
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Remote places: Static models are typically situated remotely, growing Value and decreasing Over-all method effectiveness.
30% of its peak energy usage, presenting our prospects major reduction in operating prices and amplified dependability.
the knowledge beneath is categorized by semiconductor course of action and Instrument manufacturer. Every single desk consists of an apps Matrix that reveals qulified and industrial procedures.
at first Started in 1985, our organization has grown right into a acknowledged leader in supplying temperature Management programs to the global semiconductor business.
LAUDA-Noah will, for a consumer's retrofit analysis, watch and regulate its fluid temperature Handle profiles to match an present TCUs' so as to guarantee a clean procedure integration by means of DAQ.
The precision in the POU 3300 allows for impartial Charge of the process fluid temperature to the wafer chuck within +/- 0.1 °C of set stage, along with the rapid reaction time from the technique allows for max wafer-to-wafer repeatability all through the etch method.
All static TCUs call for excess cooling & heating capacities because of their pretty big approach fluid reservoirs. The process fuid reservoir on LAUDA-Noah's dynamic temperature Regulate method is less than 1 gallon.
With the POU3300, you'll be able to attain unparalleled brings about etch effectiveness, chamber uptime, diminished expense of possession and fab Area utilization – all while bettering your course of action reliability.
huge Footprint: Static models occupy major House throughout the fabrication Software spot, cutting down its performance.
LAUDA-Noah is meeting these new issues and it has incorporated Electricity conserving technology in units which might be pleasant on the natural environment and have a website low priced to work.
The TEs' can swap straight from heating to cooling, or visa-versa. they are able to activate & off although while in the heating or cooling mode and will enhance or reduce the level of heating or cooling without switching in any way.
in excess of at any time, shrinking device geometries, demanding new procedures plus a very aggressive setting require temperature Manage devices that Blend speedy and correct temperature Handle with an emphasis on diminished functioning costs and improved reliability.
the truth is usually that real Dynamic Temperature Handle can only be realized when all five (5) of the next technique structure and installation prerequisites are fulfilled:
(Therefore, installing a static unit beside chamber will not help it to offer dynamic temperature Manage)
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